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Silicon Polishing Slurry
We developed SW-1002 slurry for silicon stock polishing based on home-made, high purity colloidal silica, which has the advantages including high dilution rate, easy to be cleaned after polishing,etc.
The product is extensively applied to the integrate circuit substrate.

Specification

Inspection Items

Inspection Methods

Specification

Appearance

Eye-measurement

Milky White Liquid

Solid Content(%)

Gravimetric Method

40±2

pH Value(20℃)

pH Meter

11.5-12.5

Particle Size(nm)

Dynamic Light Scattering

80±10

LPC(parts/ml)

Optical Particle Sizer

﹤1000000

【Package】

Net Weight:25kg/pail.

 

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